Microfabricated Neuroaccelerometer: Integrating Sensing and Reservoir Computing in MEMS

23 Mar 2020 Barazani Bruno Dion Guillaume Morissette Jean-François Beaudoin Louis Sylvestre Julien

This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass electrostatically coupled to an oscillating beam through a gap of 8 {\mu}m. The motion of the inertial mass modulates an AC electrostatic field that drives the beam in its non-linear regime... (read more)

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